This dissertation work is focused on selenium compounds and their utilization in modern materials sciences. Selected thin film deposition techniques with emphasis on Atomic Layer Deposition (ALD) are briefly introduced along with possible utilization of manufactured nanolayers. The latter part of the thesis is devoted to various organic selenides as potential ALD precursors. Several cyclic silyl-selenides, linear silylselenides, silylselenols, stanylselenides and one silyltelluride were prepared using described, modified, and newly developed synthetic pathways. All target molecules were characterized by GC/MS and multinuclear NMR. DSC and TG analyses were employed to determine fundamental thermal behaviour, as a key parameter of ALD precursors. The last part of the work is dedicated to testing selected selenides in ALD to produce MoSe2 and Sb2Se3 thin films.
