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Title: Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition Type: article Author: Charvot, Jaroslav; Pokorný, Daniel; Zazpe, Raul; Krumpolec, Richard; Pavliňák, David; Hromádko, Luděk; Přikryl, Jan; Rodriguez Pereira, Jhonatan; Klikar, Milan; Jelínková, Veronika; Macák, Jan; Bureš, Filip Date: 2020

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