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Title: Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties Type: article Author: Capek, J; Batkova, S; Matas, M; Kos, S; Kozak, T; Haviar, S; Houska, J; Schusser, J; Minar, J; Dvořák, Filip; Zeman, P Date: 2020

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